Title:
【発明の名称】鉛含有ペロブスカイト構造複合酸化物強誘電体薄膜製造用スパッタリングターゲット材およびその製法
Document Type and Number:
Japanese Patent JP3127575
Kind Code:
B2
Inventors:
Yukihiro Ouchi
Akio Takahashi
Fumio Nada
Tadashi Sugihara
Takuo Takeshita
Akio Takahashi
Fumio Nada
Tadashi Sugihara
Takuo Takeshita
Application Number:
JP14885792A
Publication Date:
January 29, 2001
Filing Date:
May 15, 1992
Export Citation:
Assignee:
Mitsubishi Materials Corporation
International Classes:
C23C14/34; H01B3/12; H01G4/33; H01G7/06; (IPC1-7): C23C14/34; H01B3/12; H01G4/33; H01G7/06
Domestic Patent References:
| JP6153119A | ||||
| JP62297463A |
Attorney, Agent or Firm:
Shoichi Hirose (1 person outside)