Title:
【発明の名称】プローブ顕微鏡装置の探針接近方法
Document Type and Number:
Japanese Patent JP3325373
Kind Code:
B2
Abstract:
PURPOSE:To provide a method by which the probe of a probe microscope can be safely brought nearer to a sample in a short time without causing the probe to collide with the sample. CONSTITUTION:A sample 4 set on a sample stage 5 is observed under an optical microscope 10. A probe 1 is positioned within the visual field of the microscope 10. A Z-axis displacing mechanism 2 moves the probe 1 in the vertical direction and a lifting/lowering mechanism 11 moves the microscope 10 in the vertical direction. The image of the sample 4 obtained through the microscope 10 is displayed on a display device 14 by means of a CCD camera 12 and picture processor 13. When the probe 1 is brought nearer to the sample 4, the microscope 10 is focused at a position at a very short distance from the surface of the sample 4 and the probe 1 is brought to the focusing position of the microscope 10 in the same state. Thereafter, the probe 1 is slowly brought nearer to the sample 4 until the probe 1 reaches a point at a prescribed distance from the sample 4. Since the distance between the probe 1 and sample 4 can be extremely shortened in the first approaching operation, the overall moving time of the probe 1 can be remarkably reduced.
Inventors:
Takashi Morimoto
Ken Murayama
Ken Murayama
Application Number:
JP33661293A
Publication Date:
September 17, 2002
Filing Date:
December 28, 1993
Export Citation:
Assignee:
Hitachi Construction Machinery Co., Ltd.
International Classes:
G01B7/34; G01B9/04; G01B21/30; G01N37/00; G01Q10/02; G01Q30/02; G01Q90/00; G06T1/00; (IPC1-7): G01N13/10; G01B7/34; G01B9/04; G01B21/30
Domestic Patent References:
| JP6273676A | ||||
| JP5264212A | ||||
| JP1186742A |
Attorney, Agent or Firm:
Kenjiro Take (1 person outside)