PURPOSE: To obtain controlling equipment of a room temperature of a clean room which can control the room temperature of the clean room to be a set temperature without consuming an unnecessary carrying power in the case when a thermal load of the clean room is small.
CONSTITUTION: An indoor temperature Ti is detected by a room temperature sensor 45, and an output frequency of an inverter 35i is changed to adjust the quantity of circulating air in the case when a cold water valve 40 or a hot water valve 41 is fully opened when there is a difference between the indoor temperature Ti and a set temperature To, while the opening of the cold water valve 40 or the hot water valve 41 is regulated in the case when the cold water valve 40 or the hot water valve 41 is not fully opened. Thereby the indoor temperature Ti of a clean room 32 is controlled to be the set temperature To.
ARAI YOSHIAKI
HARADA MITSUAKI
SUMIDA AKIRA
SASAKI MINEO
SHIN NIPPON KUCHO KK
TOSHIBA CORP