Title:
【発明の名称】層構造体の作製方法およびその応用
Document Type and Number:
Japanese Patent JPH09505155
Kind Code:
A
Abstract:
PCT No. PCT/DE94/01361 Sec. 371 Date May 10, 1996 Sec. 102(e) Date May 10, 1996 PCT Filed Nov. 12, 1994 PCT Pub. No. WO95/14250 PCT Pub. Date May 26, 1995The invention concerns a method of producing a surface layer structure by doping a matrix with metal ions. The aim of the invention is to provide a method of this kind in which the depth distribution of the metal ions in the substrate can be regulated, thus optimumizing the doping without incurring any of the disadvantages inherent in the prior art methods. This is achieved by first depositing matrix material on a suitable substrate by laser ablation in an atmosphere of oxygen, thus forming a on surface of the substrate a first layer a matrix material. Dopant is then deposited on the surface of the first layer, followed by more matrix material. The result is a uniform doping of the deposited matrix at a defined depth in the surface layer structure.
Inventors:
Bauer Stephanie
Royster martin
Tsundery
Schubert Jürgen
Buchal Christoph
Royster martin
Tsundery
Schubert Jürgen
Buchal Christoph
Application Number:
JP51415895A
Publication Date:
May 20, 1997
Filing Date:
November 12, 1994
Export Citation:
Assignee:
Forschungszentrum Jürich Gesellschaft Mito Beschlenktel Haftung
International Classes:
C01G33/00; C23C14/08; G02B6/13; G02B6/12; (IPC1-7): G02B6/13
Attorney, Agent or Firm:
Mitsuyoshi Esaki (3 outside)