Title:
【発明の名称】基板上の反射防止コーティングの処理方法
Document Type and Number:
Japanese Patent JPH10507588
Kind Code:
A
Abstract:
A method of treating an anti-reflective coating on a substrate. The method includes exposing the anti-reflective coating to a dosage of ultraviolet radiation sufficient to result in the direct removal of at least a portion of the exposed anti-reflective coating.
Inventors:
Insaraco, Linda
Mitchener, James
Mitchener, James
Application Number:
JP51327696A
Publication Date:
July 21, 1998
Filing Date:
October 12, 1995
Export Citation:
Assignee:
Fusion Systems Corporation
International Classes:
G03F7/11; B05D3/06; B05D5/06; C09D5/00; G02B1/11; G03F7/09; H01L21/027; H01L21/033; H01L23/29; H01L23/31; (IPC1-7): H01L21/027; B05D3/06; B05D5/06; C09D5/00; G02B1/11; G03F7/11; H01L23/29; H01L23/31
Attorney, Agent or Firm:
Kazuo Kobashi (1 person outside)