ＰＶＡブラシの洗浄方法及び装置

Title:

ＰＶＡブラシの洗浄方法及び装置

Document Type and Number:

Japanese Patent JP7168941

Kind Code:

B2

Abstract:

A PVA brush cleaning method includes immersing a PVA brush in a cleaning solution containing an organic matter, thereby removing a siloxane compound in the PVA brush; and applying vibration to the PVA brush, thereby removing impurities in the PVA brush.

Inventors:

Jin-gu Park
Jun Fan Lee
Satomi Hamada

Application Number:

JP2020515697A

Publication Date:

November 10, 2022

Filing Date:

September 20, 2018

Export Citation:

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Assignee:

Ebara Corporation
Industry-University Corporation Foundation Hanyang University Erika Campus

International Classes:

H01L21/304; A46B17/06; A46D9/04

Domestic Patent References:

JP11323000A
JP2010021457A
JP10223583A
JP11207271A

Foreign References:

US20190006204

Attorney, Agent or Firm:

Murayama Yasuhiko
Shinya Mihiro
Tatsuhiko Abe

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