Title:
PACKAGE MANUFACTURING METHOD, PACKAGE, PIEZOELECTRIC TRANSDUCER, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO CLOCK
Document Type and Number:
Japanese Patent JP2012039511
Kind Code:
A
Abstract:
To provide a method of manufacturing packages, a package, a piezoelectric transducer, an oscillator, an electronic apparatus and a radio clock that can improve a yield by reducing warpage of a first substrate and can improve mechanical strength of a package.
The package manufacturing method has a reform process for applying heat to a wafer 40 for a base substrate in a state of being pinched from both sides in the thickness direction by reform jigs between a filling process and a second grinding process, and the reform jigs are warped in an opposite direction to the warp direction of the wafer 40 for a base substrate caused by a difference of thermal expansion coefficients between the wafer 40 for a base substrate and a glass frit 38.
Inventors:
Funabiki, Yoichi
Application Number:
JP2010000179512
Publication Date:
February 23, 2012
Filing Date:
August 10, 2010
Export Citation:
Assignee:
SEIKO INSTRUMENTS INC
International Classes:
H03H3/02; H01L23/04; H03B5/32; H03H9/02
