To provide a small-sized and highly-sensitive pressure detection device capable of detecting the outside pressure accurately over a long period.
This package for the pressure detection device comprises a ceramic substrate 1 having plural metallized wiring conductors 6, and having a loading part 1b of a semiconductor element 4 on one main surface and a first metallized electrode 8 for capacitance formation connected electrically to the metallized wiring conductors 6 on the other main surface, a ceramic board 2 jointed to the ceramic substrate 1 in the flexible state so as to form an enclosed space S between itself and the other main surface of the ceramic substrate 1, and having a second metallized electrode 10 facing to the first metallized electrode 8 on its inside main surface, and a protection board 3 disposed so as to have a gap G between the outside main surface of the ceramic board 2 and the outside main surface thereof, and having a through hole 3a penetrating from the outside to the gap G.
JP7237711 | pressure sensor |
JPS6015646 | [Title of the device] Differential pressure and a pressure sensing machine |
WO/1999/050633 | DIFFERENTIAL PRESSURE TRANSDUCER |