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Patent Searching and Data


Title:
PACKAGE FOR PRESSURE DETECTION DEVICE
Document Type and Number:
Japanese Patent JP2003065869
Kind Code:
A
Abstract:

To provide a small-sized and highly-sensitive pressure detection device capable of detecting the outside pressure accurately over a long period.

This package for the pressure detection device comprises a ceramic substrate 1 having plural metallized wiring conductors 6, and having a loading part 1b of a semiconductor element 4 on one main surface and a first metallized electrode 8 for capacitance formation connected electrically to the metallized wiring conductors 6 on the other main surface, a ceramic board 2 jointed to the ceramic substrate 1 in the flexible state so as to form an enclosed space S between itself and the other main surface of the ceramic substrate 1, and having a second metallized electrode 10 facing to the first metallized electrode 8 on its inside main surface, and a protection board 3 disposed so as to have a gap G between the outside main surface of the ceramic board 2 and the outside main surface thereof, and having a through hole 3a penetrating from the outside to the gap G.


Inventors:
KINOMURA KOJI
Application Number:
JP2001258369A
Publication Date:
March 05, 2003
Filing Date:
August 28, 2001
Export Citation:
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Assignee:
KYOCERA CORP
International Classes:
G01L13/06; (IPC1-7): G01L13/06