To provide a packaging method and a packaging apparatus for effectively preventing re-deposition of dirt eliminated from a joining face onto the joining face in the case of cleaning the joining face of objects to be joined by energy waves or energy particles before joining so as to enhance the cleaning effect and attain the joining with high reliability.
The packaging method and the packaging apparatus are characterized in that: both the objects to be joined are placed vertically and opposed to each other, and after the joining face, directed downward, of the upper side object to be joined is earlier cleaned by the energy waves or energy particles, the joining face, directed upward, of the lower side object to be joined is cleaned; or both the objects to be joined are horizontally placed and opposed to each other and the opposed joining faces are cleaned by the energy waves or energy particles; or a partition plate is inserted between both the objects to be joined and the joining faces are cleaned.
NARABA SATOSHI