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Patent Searching and Data


Title:
PACKAGING METHOD AND PACKAGING APPARATUS
Document Type and Number:
Japanese Patent JP2004006707
Kind Code:
A
Abstract:

To provide a packaging method and a packaging apparatus for effectively preventing re-deposition of dirt eliminated from a joining face onto the joining face in the case of cleaning the joining face of objects to be joined by energy waves or energy particles before joining so as to enhance the cleaning effect and attain the joining with high reliability.

The packaging method and the packaging apparatus are characterized in that: both the objects to be joined are placed vertically and opposed to each other, and after the joining face, directed downward, of the upper side object to be joined is earlier cleaned by the energy waves or energy particles, the joining face, directed upward, of the lower side object to be joined is cleaned; or both the objects to be joined are horizontally placed and opposed to each other and the opposed joining faces are cleaned by the energy waves or energy particles; or a partition plate is inserted between both the objects to be joined and the joining faces are cleaned.


Inventors:
YAMAUCHI AKIRA
NARABA SATOSHI
Application Number:
JP2003066586A
Publication Date:
January 08, 2004
Filing Date:
March 12, 2003
Export Citation:
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Assignee:
TORAY ENG CO LTD
International Classes:
H05K3/34; H01L21/00; H01L21/02; H01L21/304; H01L21/60; H05K3/26; (IPC1-7): H01L21/304; H01L21/02; H05K3/26; H05K3/34
Attorney, Agent or Firm:
Toshimitsu Ban