基板収納容器の梱包体 - Shin-Etsu Polymer Co., Ltd.

Title:

基板収納容器の梱包体

Document Type and Number:

Japanese Patent JP6466179

Kind Code:

B2

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Inventors:

Akira Kashimoto

Application Number:

JP2015005038A

Publication Date:

February 06, 2019

Filing Date:

January 14, 2015

Export Citation:

Assignee:

Shin-Etsu Polymer Co., Ltd.

International Classes:

B65D81/05; B65D6/18; B65D6/26; B65D85/38; H01L21/673

Domestic Patent References:

Attorney, Agent or Firm:

Tomohiro Sakamoto
Ayumi Yada
Toshihiro Oishi

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