To provide a pad conditioning device and a pad conditioning method for quickly and efficiently removing a foreign matter on an abrasive pad and restricting a splashing of the foreign matter into the surroundings.
A rotation shaft (not shown) mounted outside a platen is provided with a dresser 23 (anti-clogging means) via an arm 22. The arm 22 is provided with a cover 24 which covers around the dresser 23 and forms a space partitioned from the outside between the dresser 23 and the surface of an abrasive pad 4. A suction device 25 which sucks the foreign matter on the abrasive pad 4 is connected to a space K formed between the cover 24 and the abrasive pad 4. The arm 22 is provided with a cleaning fluid jetting means for spraying a cleaning fluid on the abrasive pad 4.
TANAKA HIROSHI
Next Patent: SURFACE PLATE SURFACE FINISHING DEVICE