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Patent Searching and Data


Title:
PAD CONDITIONING DEVICE AND PAD CONDITIONING METHOD
Document Type and Number:
Japanese Patent JP2001277095
Kind Code:
A
Abstract:

To provide a pad conditioning device and a pad conditioning method for quickly and efficiently removing a foreign matter on an abrasive pad and restricting a splashing of the foreign matter into the surroundings.

A rotation shaft (not shown) mounted outside a platen is provided with a dresser 23 (anti-clogging means) via an arm 22. The arm 22 is provided with a cover 24 which covers around the dresser 23 and forms a space partitioned from the outside between the dresser 23 and the surface of an abrasive pad 4. A suction device 25 which sucks the foreign matter on the abrasive pad 4 is connected to a space K formed between the cover 24 and the abrasive pad 4. The arm 22 is provided with a cleaning fluid jetting means for spraying a cleaning fluid on the abrasive pad 4.


Inventors:
KOBAYASHI TATSUNOBU
TANAKA HIROSHI
Application Number:
JP2000099648A
Publication Date:
October 09, 2001
Filing Date:
March 31, 2000
Export Citation:
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Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
B24B53/017; B24B53/02; B24B55/08; H01L21/304; (IPC1-7): B24B37/00; B24B53/02; B24B55/08; H01L21/304
Attorney, Agent or Firm:
Masatake Shiga (6 people outside)