Title:
パドル、該パドルを備えためっき装置、およびめっき方法
Document Type and Number:
Japanese Patent JP6761763
Kind Code:
B2
Abstract:
A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate is disclosed. The paddle includes a plurality of vertically-extending agitation rods. Each agitation rod includes: a planar portion perpendicular to a reciprocating direction of the paddle; two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion; and a tip portion connected with the two slope surfaces.
Inventors:
Yasuyuki Masuda
Tadashi Shimoyama
Junpei Fujikata
Youhei Wakuda
Zhang Shahua
Tadashi Shimoyama
Junpei Fujikata
Youhei Wakuda
Zhang Shahua
Application Number:
JP2017019507A
Publication Date:
September 30, 2020
Filing Date:
February 06, 2017
Export Citation:
Assignee:
Ebara Corporation
International Classes:
C25D21/10
Domestic Patent References:
| JP2010010557A | ||||
| JP2009155727A | ||||
| JP2016006225A | ||||
| JP2005008911A | ||||
| JP48086456U |
Foreign References:
| US8920616 | ||||
| US20140262803 |
Attorney, Agent or Firm:
Tetsuya Hirosawa
Isamu Watanabe
Isamu Watanabe