To provide a panel sensor also having functions other than, for example a touch input function, without adding any new configuration.
Force operating on the panel is added to a panel support section 14 provided at a diaphragm section 11. When the applied force is relatively small, the force can be detected by detecting the displacement of a thin film at the diaphragm section 11. Conversely, when the applied force is relatively large, the diaphragm section 11 itself is displaced. The displacement of the diaphragm section 11 is detected by detecting the deflection of beam sections 13c, 13d for connecting the diaphragm section 11 and an inner frame 25, and the deflection of beam sections 13a, 13b for connecting the inner frame 25 and a fixed frame 17, and hence the level of the applied force can be detected.
