Title:
ナノリソグラフィのための平行個別アドレス可能プローブ
Document Type and Number:
Japanese Patent JP2005507175
Kind Code:
A
Abstract:
A microfabricated probe array for nanolithography and process for designing and fabricating the probe array. The probe array consists of individual probes that can be moved independently using thermal bimetallic actuation or electrostatic actuation methods. The probe array can be used to produce traces of diffusively transferred chemicals on the substrate with sub-1 micrometer resolution, and can function as an arrayed scanning probe microscope for subsequent reading and variation of transferred patterns.
Inventors:
Liu, Chang
Zhang, Ming
Bren, David Andrew
Zhang, Ming
Bren, David Andrew
Application Number:
JP2003539142A
Publication Date:
March 10, 2005
Filing Date:
July 26, 2002
Export Citation:
Assignee:
The Board of Trustees of the University of Illinois
International Classes:
B81B3/00; B81B7/04; G01Q60/38; G01Q70/16; G01Q70/18; G01Q80/00; G03F7/00; G03F7/20; H01L21/027; G01N35/10; (IPC1-7): H01L21/027; B81B3/00; G01N13/16; G12B21/02
Attorney, Agent or Firm:
Takehiko Saito
Yasuyuki Hata
Yasuyuki Hata