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Patent Searching and Data


Title:
PARALLEL SLIDER DEVICE OF PNEUMATIC LINEAR GUIDE METHOD, CONTROL METHOD OF SAME, AND MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2011185437
Kind Code:
A
Abstract:

To provide a parallel slider device by pneumatic linear guides, eliminating deterioration of reproducibility of parallelism due to mutual influence of mechanical rigidity of a connecting part of the slider and air bearing rigidity of an air slide mechanism to secure high-accuracy parallelism reproducibility when two slides are mechanically connected to each other.

The size of an air gap and the supply air pressure are varied by a first pneumatic linear guide 48 and a second pneumatic linear guide 54 to cause a difference in slider support rigidity (the air bearing rigidity), and a straightness error is absorbed by an air gap change stably on the lower air bearing rigidity side.


Inventors:
Naoi, Kaoru
Ishizaki, Yoichi
Iuchi, Tatsuhito
Sekiguchi, Koichi
Application Number:
JP2011000047009
Publication Date:
September 22, 2011
Filing Date:
March 03, 2011
Export Citation:
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Assignee:
KURODA PRECISION IND LTD
International Classes:
F16C32/06; F16C29/02; G01B7/06; G01B7/34