Title:
PARALLEL SLIDER DEVICE OF PNEUMATIC LINEAR GUIDE METHOD, CONTROL METHOD OF SAME, AND MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2011185437
Kind Code:
A
Abstract:
To provide a parallel slider device by pneumatic linear guides, eliminating deterioration of reproducibility of parallelism due to mutual influence of mechanical rigidity of a connecting part of the slider and air bearing rigidity of an air slide mechanism to secure high-accuracy parallelism reproducibility when two slides are mechanically connected to each other.
The size of an air gap and the supply air pressure are varied by a first pneumatic linear guide 48 and a second pneumatic linear guide 54 to cause a difference in slider support rigidity (the air bearing rigidity), and a straightness error is absorbed by an air gap change stably on the lower air bearing rigidity side.
Inventors:
NAOI KAORU
ISHIZAKI YOICHI
IUCHI TATSUHITO
SEKIGUCHI KOICHI
ISHIZAKI YOICHI
IUCHI TATSUHITO
SEKIGUCHI KOICHI
Application Number:
JP2011047009A
Publication Date:
September 22, 2011
Filing Date:
March 03, 2011
Export Citation:
Assignee:
KURODA PRECISION IND LTD
International Classes:
F16C32/06; F16C29/02; G01B7/06; G01B7/34
Domestic Patent References:
| JPS57187926U | 1982-11-29 | |||
| JP2003508696A | 2003-03-04 | |||
| JP2004330405A | 2004-11-25 | |||
| JP2000337858A | 2000-12-08 | |||
| JPS57187926U | 1982-11-29 |
Attorney, Agent or Firm:
Yoichi Oshima
Previous Patent: COUPLING ELEMENT FOR CONNECTING TWO PIPE ENDS
Next Patent: SELF-TENSIONING PULLEY APPARATUS FOR BELT DRIVE
Next Patent: SELF-TENSIONING PULLEY APPARATUS FOR BELT DRIVE