Title:
PARTIAL TEMPERATURE CONTROL METHOD IN CLEAN ROOM AND LATTICE LIKE CEILING FRAME USED THEREIN
Document Type and Number:
Japanese Patent JPH05154325
Kind Code:
A
Abstract:
PURPOSE: To arbitrarily, simply and rapidly alter the position and area of a partial temp. control region.
CONSTITUTION: In the ceiling of a clean room constituted so that filters 10 are mounted on a lattice like ceiling frame 2 and a ceiling back chamber 3 is formed above the filters 10 and compressed air is supplied to the ceiling back chamber 3 to allow clean air to flow down to a clean chamber 1 through the filters 10, the filters 10 at a required place are covered with a cover 12 from above and pressurized air controlled to required temp. is supplied from the air conditioner in to the cover 12 and clean air controlled to required temp. is allowed to flow out of the filters 10 of the cover region.
Inventors:
KAKIZAKI JIRO
Application Number:
JP35094691A
Publication Date:
June 22, 1993
Filing Date:
December 10, 1991
Export Citation:
Assignee:
TAKENAKA KOMUTEN CO
International Classes:
B01D46/42; F24F7/06; (IPC1-7): B01D46/42; F24F7/06
Attorney, Agent or Firm:
Yoshio Imaoka