Title:
粒子ビーム色収差補償コラム
Document Type and Number:
Japanese Patent JP3844253
Kind Code:
B2
Abstract:
A particle-beam column comprising a needle-type ions source (1) such as a liquid metal ion source, one or more round lenses (2), and a plurality of interleaved quadrupole lenses (14, 16). Also an ion-beam column comprising a liquid alloy ion source (1), interleaved quadrupole lenses (14, 16), and a Wien velocity filter (22). Such columns produce a more finely focused beam than columns based only on electrostatic lenses, and allow increased lens apertures and larger beam currents.
Inventors:
Martin, Frederick Wight
Application Number:
JP51678996A
Publication Date:
November 08, 2006
Filing Date:
November 18, 1994
Export Citation:
Assignee:
Martin, Frederick Wight
International Classes:
H01J37/145; A61M1/14; G21K1/08; H01J3/12; H01J3/26; H01J23/08; H01J29/58; H01J37/153
Domestic Patent References:
| JP3173424A | ||||
| JP6068833A | ||||
| JP4233145A | ||||
| JP5258703A | ||||
| JP6176722A | ||||
| JP54100665A | ||||
| JP2230647A | ||||
| JP61118954A |
Other References:
L.R.Harriott, W.L.Brown, D.L.Barr, Achromatic quadrupole focusing systems for use with liquid metal ion sources, Journal of Vacuum Science & Technology B, Vol.8, No.6 Nov/Dec 1990, pp.1706-1710
Previous Patent: 蒸発装置
Next Patent: ANTI-FOGGING AGENT COATED SYNTHETIC RESIN ARTICLE AND MANUFACTURE THEREOF
Next Patent: ANTI-FOGGING AGENT COATED SYNTHETIC RESIN ARTICLE AND MANUFACTURE THEREOF