To provide a particle beam transmission window and a particle beam irradiation device having the particle beam transmission window, which can achieve the high transmittance of a particle beam including a charged particle beam such as an electron beam and an ion beam and an electromagnetic wave such as an X-ray and a gamma-ray while avoiding the breakage due to an atmospheric pressure from the outside and a pressure fluctuation.
A transmission window 130 is mounted on a vacuum chamber 102 of an electron beam irradiation device 100 having a generation part 104 of electron beams 110, and transmits the electron beams 110 from the inside to the outside of the vacuum chamber 102. The transmission window includes a metal thin film 132 transmitting the electron beams 110, and first and second frames 134, 142 which are airtightly joined to the metal thin film 132 in a manner to hold the metal thin film 132 therebetween in order to mount the metal thin film 132 on the vacuum chamber 102. The first and second frames 134, 142 have a honeycomb structure in a transmission area 126 of the electron beams 110.
| JPS4824661B1 | 1973-07-23 | |||
| JPH03251800A | 1991-11-11 | |||
| JPS4860000U | 1973-07-30 | |||
| JP2005091107A | 2005-04-07 | |||
| JPS3827499Y1 | ||||
| JPS57158600A | 1982-09-30 | |||
| JP2007240454A | 2007-09-20 | |||
| JPS4824661B1 | 1973-07-23 | |||
| JPH03251800A | 1991-11-11 | |||
| JPS4860000U | 1973-07-30 |
Keisuke Matsuyama
Tsuyoshi Makino
Next Patent: PORTABLE WEIGHT MEASURING INSTRUMENT