To provide a particle group charging method of evenly charging a particle group containing electrified particles in a cell by means of an electric field formed between a mask and an electrode.
A method of charging a particle group containing electrified particles in a cell of a substrate structure in which cells partitioned by partition walls are formed, includes: disposing a substrate so that an opening of each of the cells is directed downward; disposing masks each corresponding to the opening of each of the cells at a position adjacent to the partition wall; disposing a particle supply member, filled with a particle group, under the mask while being in contact with the mask; forming an electric potential difference between the mask and an electrode formed on the substrate; electrifying the particle group by moving the particle supply member while keeping it in contact with the mask; and filling the cell with the particle group via an opening formed in the mask by means of the electric field formed between the mask and the electrode.
MUTSUO SATOSHI
Kazuyuki Tomita
Reiko Otani