Title:
PARTICLE MANUFACTURING METHOD AND APPARATUS
Document Type and Number:
Japanese Patent JP2004243253
Kind Code:
A
Abstract:
To provide a method of manufacturing particles uniform in a particle diameter in a reaction vessel.
The particle manufacturing apparatus has a reaction vessel 1, a gas introducing portion 2 introducing a raw material gas and a reaction inhibitor generating gas, an inert gas introducing portion introducing a carrier gas into the reaction vessel 1, a heater 5 provided in the reaction vessel 1, and a discharge portion 6 to control the growth of particles by using the reaction of formation of particles and its reverse reaction.
Inventors:
MATSUI ISAO
Application Number:
JP2003037587A
Publication Date:
September 02, 2004
Filing Date:
February 17, 2003
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B01J19/00; B01J6/00; B01J12/02; B01J23/745; B01J23/75; B01J23/755; B01J37/08; B22F9/30; C01B32/40; (IPC1-7): B01J19/00; B22F9/30
Attorney, Agent or Firm:
Hideaki Togawa