Title:
粒子計測装置および粒子計測方法
Document Type and Number:
Japanese Patent JP6395138
Kind Code:
B2
Inventors:
Yuichi Kuroda
Hirano Masaki
Kenichi Otsuka
Hirano Masaki
Kenichi Otsuka
Application Number:
JP2015180055A
Publication Date:
September 26, 2018
Filing Date:
September 11, 2015
Export Citation:
Assignee:
Toshiba Memory Corporation
International Classes:
G01N15/06
Domestic Patent References:
| JP2003004624A | ||||
| JP2003083949A | ||||
| JP2007057532A | ||||
| JP2011202965A | ||||
| JP2008224689A | ||||
| JP61272635A | ||||
| JP62225926A |
Foreign References:
| WO2007010698A1 |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira