Title:
微粒子除去膜装置、超純水製造装置、及び超純水製造方法
Document Type and Number:
Japanese Patent JP7257824
Kind Code:
B2
Abstract:
To provide a fine particle removal membrane device used in an ultrapure water production device to remove fine particles in water, which allows at least one of its sterilization and cleaning to be performed without interrupting supply of ultrapure water to a point of use even when an amount of treated water in the ultrapure water production device is large.SOLUTION: A fine particle removable membrane device has a plurality of membrane modules including a fine particle removal membrane, and at least some of the membrane modules are installed in parallel with each other. The fine particle removal membrane device further includes: a flow path that allows water to pass through a first membrane module of the membrane modules installed in parallel so as to be distinguished from a second membrane module, and switching means for switching the flow path. By supplying water to at least one membrane module, fine particles contained in the water are removed.SELECTED DRAWING: Figure 2
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Inventors:
Kondo Tsukasa
Fumiki Ichihara
Hiroshi Sugawara
Fumiki Ichihara
Hiroshi Sugawara
Application Number:
JP2019044838A
Publication Date:
April 14, 2023
Filing Date:
March 12, 2019
Export Citation:
Assignee:
Organo Corporation
International Classes:
C02F1/44; B01D61/18; B01D65/02; B01D65/06
Domestic Patent References:
JP2001029756A | ||||
JP2018144014A | ||||
JP2001239134A | ||||
JP2002045659A | ||||
JP2001293470A | ||||
JP2014094376A | ||||
JP2014000548A |
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata
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