Title:
基板と一体化された粒子センサ
Document Type and Number:
Japanese Patent JP5236652
Kind Code:
B2
Abstract:
A substrate-like particle sensor includes a substrate-like base portion and an electronics enclosure disposed on the substrate-like base portion. A power source is located within the electronics enclosure. A controller is operably coupled to the power source. A particle sensor is operably coupled to the controller and provides an indication to the controller of at least one particle present near the particle sensor.
Inventors:
Bonci Orini, Dennis Jay
Ramsey, Craig Sea
Gardner, Del Rae H
Feudae Jay, Shuda
Ramsey, Craig Sea
Gardner, Del Rae H
Feudae Jay, Shuda
Application Number:
JP2009530410A
Publication Date:
July 17, 2013
Filing Date:
September 27, 2007
Export Citation:
Assignee:
Cyber Optics Semiconductor Incorporated
International Classes:
G01N15/00; G01G3/16
Domestic Patent References:
| JP11328554A | ||||
| JP62220833A | ||||
| JP2002357532A | ||||
| JP2006214744A | ||||
| JP2000019095A | ||||
| JP3108635A | ||||
| JP57120842A | ||||
| JP2004251876A | ||||
| JP10189675A | ||||
| JP2000138274A |
Foreign References:
| US20060017926 | ||||
| US6956230 |
Attorney, Agent or Firm:
Hajime Tsukuni
Yasuo Yanagibashi
Yasuo Yanagibashi