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Title:
粒子径分布測定装置、粒子径分布測定方法および粒子径分布測定用プログラム
Document Type and Number:
Japanese Patent JP7045910
Kind Code:
B2
Abstract:
To measure the particle size distribution stably and accurately even for a sample such as a picket fence where the particle size distribution has difficulty to be measured if it is a conventional case.SOLUTION: Disclosed is a method for measuring the particle size distribution, in which an iterative solution method is made to be used. As the iterative solution method, the combined iterative solution method is made to be used, which is the iterative solution method obtained by combining a first solution method which is the iterative solution method belonging to an EM method and a second solution method which is the iterative solution method belonging to a Chahine method in a predetermined relationship.SELECTED DRAWING: Figure 3

Inventors:
Nakabamasa Sugazawa
Application Number:
JP2018074236A
Publication Date:
April 01, 2022
Filing Date:
April 06, 2018
Export Citation:
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Assignee:
HORIBA, Ltd.
International Classes:
G01N15/02
Domestic Patent References:
JP2015001478A
JP2002513151A
JP2002340780A
JP2008111810A
Attorney, Agent or Firm:
Nishimura Ryuhei
Shindai Saito



 
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