Title:
部品の製造方法および研磨装置
Document Type and Number:
Japanese Patent JP6513236
Kind Code:
B2
Inventors:
Torikai Takehiro
Hashizume etc.
Hashizume etc.
Application Number:
JP2018001346A
Publication Date:
May 15, 2019
Filing Date:
January 09, 2018
Export Citation:
Assignee:
Canon Inc
International Classes:
B24B13/02; B24B11/10; B24B13/005
Domestic Patent References:
| JP3111163A | ||||
| JP11151649A | ||||
| JP2008260091A | ||||
| JP53018088A | ||||
| JP2007185755A | ||||
| JP2011224669A |
Foreign References:
| US3886696 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa