Title:
PASSIVE CERAMIC ELEMENT
Document Type and Number:
Japanese Patent JP2000223347
Kind Code:
A
Abstract:
To provide an improved thin-film capacitor.
A conductive metal oxide is used for a barrier layer 4 in this passive ceramic element provided with a carrier substrate, at least a first electrode 3, a barrier layer 4, a dielectric 5 and a second electrode 7 are provided in this passive ceramic element. A metal, an alloy or a conductive oxide is used as a barrier layer.
Inventors:
LOEBL HANS-PETER
RAASCH DETLEF
BENTIN HORST
MUCH GERD
BACHMANN PETER KLAUS
KLEE MAREIKE
RAASCH DETLEF
BENTIN HORST
MUCH GERD
BACHMANN PETER KLAUS
KLEE MAREIKE
Application Number:
JP2000015558A
Publication Date:
August 11, 2000
Filing Date:
January 25, 2000
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV
International Classes:
H01G4/12; H01L21/02; (IPC1-7): H01G4/12
Attorney, Agent or Firm:
Akihide Sugimura (2 outside)