Title:
PATAANNO SHUSEIHOHO
Document Type and Number:
Japanese Patent JPS5117671
Kind Code:
A
Inventors:
KOGA KAZUO
Application Number:
JP8904674A
Publication Date:
February 12, 1976
Filing Date:
August 05, 1974
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G03F1/00; G03F1/72; G03F7/40; G03F9/00; H01L21/00; H01L21/027; H01L21/312; H05K3/00; (IPC1-7): G03F9/00; H01L21/00; H01L21/312; H05K3/00