Title:
パターン断面形状推定システム、およびプログラム
Document Type and Number:
Japanese Patent JP7199290
Kind Code:
B2
Abstract:
The present disclosure provides a pattern cross-sectional shape estimation system which includes a charged particle ray device which includes a scanning deflector that scans a charged particle beam, a detector that detects charged particles, and an angle discriminator that is disposed in a front stage of the detector and discriminates charged particles to be detected, and an arithmetic device that generates a luminance of an image, and calculates a signal waveform of a designated region on the image using the luminance. The arithmetic device generates angle discrimination images using signal electrons at different detection angles, and estimates a side wall shape of a measurement target pattern.
More Like This:
| WO/2003/075299 | DEVICE FOR DETECTING CHARGED PARTICLES AND PHOTONS |
| JP5919368 | Charged particle beam device |
| WO/2012/104942 | CHARGED PARTICLE BEAM APPARATUS |
Inventors:
Toshiyuki Yokosuka
Hirohiko Kitsuki
Daisuke Bizen
Makoto Suzuki
Yusuke Abe
Kenji Yasui
Mayuka Osaki
Hideyuki Kazumi
Hirohiko Kitsuki
Daisuke Bizen
Makoto Suzuki
Yusuke Abe
Kenji Yasui
Mayuka Osaki
Hideyuki Kazumi
Application Number:
JP2019073517A
Publication Date:
January 05, 2023
Filing Date:
April 08, 2019
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01J37/244; G01B15/04; H01J37/22; H01J37/28
Domestic Patent References:
| JP2017009334A | ||||
| JP2017062174A |
Foreign References:
| WO2014132757A1 | ||||
| WO2013122022A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office