Title:
PATTERN DRAWING APPARATUS AND LIGHT SOURCE
Document Type and Number:
Japanese Patent JP2011075742
Kind Code:
A
Abstract:
To provide a pattern drawing apparatus having a minimized light source, and to provide a light source.
The pattern drawing apparatus 1 includes a plurality of drawing units 4, each having a light source unit 30 which is minimized by using a packaged LED 311. By using an alignment sheet 319 to arrange an LED bear chip 315, which is a light-emitting unit of the packaged LED 311, in the same posture and at an equal interval, a plurality of packaged LED 311 can be easily and collectively mounted on an electrode substrate 313 with high accuracy. Thus, in the pattern drawing apparatus, the inexpensive packaged LED 311 can be used, the cost can be reduced, and the light source is minimized.
Inventors:
UMAGOE SHOICHI
ITANO YOSHIHARU
KOKUBO MASAHIKO
OKASHIYO HIDEAKI
ITANO YOSHIHARU
KOKUBO MASAHIKO
OKASHIYO HIDEAKI
Application Number:
JP2009225751A
Publication Date:
April 14, 2011
Filing Date:
September 30, 2009
Export Citation:
Assignee:
DAINIPPON SCREEN MFG
International Classes:
G03F7/20; H01L21/027
Domestic Patent References:
| JP2003168826A | 2003-06-13 | |||
| JP2007227168A | 2007-09-06 | |||
| JP2008258080A | 2008-10-23 | |||
| JP2008130628A | 2008-06-05 |
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