Title:
パターン描画装置及びパターン描画方法
Document Type and Number:
Japanese Patent JP4344162
Kind Code:
B2
Inventors:
Tadahiro Ohmi
Shigetoshi Sugawa
Takehisa research
Shigetoshi Sugawa
Takehisa research
Application Number:
JP2003107776A
Publication Date:
October 14, 2009
Filing Date:
April 11, 2003
Export Citation:
Assignee:
International Science Foundation
International Classes:
H01L21/027; G03F1/76; G03F1/78; G03F7/20
Domestic Patent References:
| JP2002372790A | ||||
| JP2003332221A | ||||
| JP2003015309A | ||||
| JP2002520837A | ||||
| JP2001133893A | ||||
| JP62021220A | ||||
| JP200171563A |
Foreign References:
| WO2002041196A1 | ||||
| WO1997043770A1 |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda