Title:
パターン描画装置
Document Type and Number:
Japanese Patent JP6828766
Kind Code:
B2
Abstract:
An exposure device (EX) has an exposure head (14) in which a beam (LB) modulated on the basis of drawing data is projected on a substrate (P), and by moving the substrate (P) in a secondary scanning direction, a pattern corresponding to the drawing data is drawn on the substrate (P). The exposure device (EX) is provided with a drawing control unit (100) that correspondingly sets the positions at which there are changes in drawing magnification pertaining to the pattern to be drawn on the substrate (P) in the secondary scanning direction to the movement amounts of the substrate (P), which are measured by a measuring mechanism that measures changes in the movement amounts of the substrate (P), and when a position at which there is a change in drawing magnification is set midway along the secondary scanning direction to a specific pixel among multiple pixels arranged in the secondary scanning direction, the drawing control unit (100) corrects the corresponding relationship between the dimension of the pixels and the movement amount measured by the measuring mechanism, with the position at which the drawing of the pixel one pixel before the specific pixel with respect to the secondary scanning direction is completed as the new change position, and sets the address of the drawing data read from a drawing data storage unit (108) to the next position at which there is a change in drawing magnification.
Inventors:
Takahiro Kurashige
Tomoyuki Watanabe
Masaki Kato
Tomoyuki Watanabe
Masaki Kato
Application Number:
JP2019092552A
Publication Date:
February 10, 2021
Filing Date:
May 16, 2019
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G03F9/00
Domestic Patent References:
| JP2003115449A | ||||
| JP2015210437A | ||||
| JP2006098727A | ||||
| JP2005241834A | ||||
| JP2005316166A | ||||
| JP11133620A | ||||
| JP6708217B2 |
Foreign References:
| WO2015152218A1 | ||||
| WO2015152217A1 | ||||
| US20050205769 |
Attorney, Agent or Firm:
Takehiro Chiba
Toshiyuki Miyadera
Takayuki Chima
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi
Toshiyuki Miyadera
Takayuki Chima
Yasuharu Nakasone
Shiro Sakai
Toru Sekiguchi