Title:
ポジ型レジスト組成物を用いたパターン形成方法
Document Type and Number:
Japanese Patent JP5216892
Kind Code:
B2
Inventors:
Hiromi Kobayashi
Shinichi Kanna
Inabe Haruki
Shinichi Kanna
Inabe Haruki
Application Number:
JP2011103878A
Publication Date:
June 19, 2013
Filing Date:
May 06, 2011
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/004; C08F20/24; G03F7/039; H01L21/027
Domestic Patent References:
| JP2005128146A | ||||
| JP2005173468A | ||||
| JP2006063025A | ||||
| JP2003292716A | ||||
| JP2006309245A |
Foreign References:
| WO2004074937A1 | ||||
| WO2005108444A1 |
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Hasegawa Hiromichi
Toshiyuki Ozawa
Hasegawa Hiromichi