Title:
PATTERN FORMING APPARATUS
Document Type and Number:
Japanese Patent JP2014154731
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pattern forming apparatus capable of forming a pattern on a substrate by a fast tact.SOLUTION: A pattern forming apparatus comprises: a coating part for coating a substrate with a coating liquid; a transfer part for transferring, onto the substrate coated with the coating liquid, only a pattern from a long film where a predetermined pattern is formed on a film base material; and a substrate transporting part for transporting the substrate from the coating part to the transfer part.
Inventors:
SHO YOSHIAKI
MARUYAMA TAKASHI
SAHODA TSUTOMU
MARUYAMA TAKASHI
SAHODA TSUTOMU
Application Number:
JP2013023741A
Publication Date:
August 25, 2014
Filing Date:
February 08, 2013
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
H05K3/28; B65H37/00; B65H41/00
Domestic Patent References:
| JP2011129927A | 2011-06-30 | |||
| JP2010192702A | 2010-09-02 | |||
| JP2007098779A | 2007-04-19 | |||
| JP2004288783A | 2004-10-14 | |||
| JP2005324394A | 2005-11-24 | |||
| JP2008194976A | 2008-08-28 |
Foreign References:
| WO2011105484A1 | 2011-09-01 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Mitsuyoshi Suzuki
Igarashi Mitsunaga
Masatake Shiga
Mitsuyoshi Suzuki
Igarashi Mitsunaga