Title:
PATTERN FORMING MATERIAL AND NOVEL AROMATIC ISOPROPENYL CARBONATE
Document Type and Number:
Japanese Patent JPH06250391
Kind Code:
A
Abstract:
PURPOSE: To provide novel pattern forming materials each capable of forming a positive type resist with high contrast and high sensitivity.
CONSTITUTION: The objective 1st pattern forming material contains a compd. having 1-5 isopropenyloxycarbonyl groups and 150-1,000 mol.wt. and insoluble in an alkaline aq. soln., an alkali-soluble polymer and an optical acid generating agent as principal components. The objective 2nd pattern forming material cotnains a polymer having a side chain contg. isopropenyloxycarbonyl groups and insoluble in an alkaline aq. soln. and an optical acid generating agent as principal components.
Inventors:
KUZUHA NOBORU
Application Number:
JP3716093A
Publication Date:
September 09, 1994
Filing Date:
February 26, 1993
Export Citation:
Assignee:
AIBAITSU KK
International Classes:
C07C69/96; C08F18/00; C08F18/24; C08F290/00; C08F299/02; G03F7/004; G03F7/028; G03F7/039; H01L21/027; (IPC1-7): G03F7/039; C07C69/96; C08F18/24; G03F7/004; G03F7/028; H01L21/027
Attorney, Agent or Firm:
Shunichiro Suzuki
Previous Patent: A display and a lighting installation for fitting rooms
Next Patent: RESIST PATTERN FORMING METHOD
Next Patent: RESIST PATTERN FORMING METHOD