パターン形成材料、並びにパターン形成方法及びパターン

Title:

パターン形成材料、並びにパターン形成方法及びパターン

Document Type and Number:

Japanese Patent JP4546349

Kind Code:

B2

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Inventors:

Yuichi Wakata
Toshiaki Hayashi
Takayanagi Hill

Application Number:

JP2005213383A

Publication Date:

September 15, 2010

Filing Date:

July 22, 2005

Export Citation:

Assignee:

FUJIFILM Corporation

International Classes:

G03F7/027; G03F7/004; G03F7/038; G03F7/20; G03F7/26; H05K3/28; H05K3/46

Domestic Patent References:

Foreign References:

WO2003087946A1

Attorney, Agent or Firm:

Koichi Hirota
Yoshihiro Nagare
Naoko Matsuda

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