Title:
パターン形成方法、及び、感活性光線性又は感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP7216040
Kind Code:
B2
Abstract:
Condition 2: In a case where the thickness T of the film is less than 800 nm, the value of γ is less than 5,000.
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Inventors:
Fumihiro Yoshino
Kenichi Harada
Shinichi Sugiyama
Keimitsu Tomiga
Kenichi Harada
Shinichi Sugiyama
Keimitsu Tomiga
Application Number:
JP2020050491A
Publication Date:
January 31, 2023
Filing Date:
March 23, 2020
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/26; G03F7/004; G03F7/039; G03F7/20; G03F7/32; G03F7/38; H01L21/027
Domestic Patent References:
| JP2004310121A | ||||
| JP2005202179A | ||||
| JP201044373A | ||||
| JP2012137565A |
Attorney, Agent or Firm:
Hideaki Ito
Fumio Mihashi
Fumio Mihashi
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