Title:
PATTERN-INSPECTING DEVICE, PATTERN INSPECTION METHOD, RECORD MEDIUM FOR STORING PATTERN INSPECTION PROGRAM
Document Type and Number:
Japanese Patent JP3507702
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pattern-inspecting device for reducing unneeded inspection time caused by the pattern defect of design-side data due to the inconveniences of a design data development circuit.
SOLUTION: A CPU 10, measurement pattern data generation parts 2, 3, 4, 5, 6, and 7, design-side data generation parts 12 and 13, a comparison circuit 14 for comparing measurement pattern data with design-side data, a retry requirement-judging means 69, and a repeated inspection instruction means 61 are at least provided. When the retry requirement-judging means 69 judges that a pattern defect exceeding an amount being specified within a region range that is specified in advance exists during inspection, the repeated inspection instruction means 61 automatically inspects a region including the range at least for two times. Also, when there is no response from the pattern inspection device side at least for a certain amount of time (when it is recognized that a flag being provided for monitoring fails) for the CPU 10, inspection continues after returning to a normally operating location.
Inventors:
Ikunao Isomura
Hideo Tsuchiya
Tomohide Watanabe
Hideo Tsuchiya
Tomohide Watanabe
Application Number:
JP18101398A
Publication Date:
March 15, 2004
Filing Date:
June 26, 1998
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01B11/24; G01N21/88; G01N21/956; G03F1/84; H01L21/027; H01L21/66; (IPC1-7): G01N21/956; G01B11/24; G03F1/08; H01L21/027; H01L21/66
Domestic Patent References:
| JP59192944A | ||||
| JP61279128A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (3 outside)
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