Title:
電子ビーム描画用パターン検査方法及び電子ビーム描画方法
Document Type and Number:
Japanese Patent JP4408536
Kind Code:
B2
Inventors:
Hideo Kohinata
Application Number:
JP2000217662A
Publication Date:
February 03, 2010
Filing Date:
July 18, 2000
Export Citation:
Assignee:
NEC Electronics Corporation
International Classes:
G03F1/20; G03F1/84; G03F7/20; H01L21/027
Domestic Patent References:
| JP5251870A | ||||
| JP5463681A | ||||
| JP6317523A | ||||
| JP364016A | ||||
| JP9304305A | ||||
| JP10209008A | ||||
| JP1126372A | ||||
| JP11224847A | ||||
| JP11329948A | ||||
| JP200193801A | ||||
| JP2001274072A | ||||
| JP20028972A | ||||
| JP5797941U |
Attorney, Agent or Firm:
Naka Kanno