To provide an inspection system for performing maintenance of a laser light source without hindering operation of inspection processing to the utmost.
This pattern inspection system 100 includes: a laser light source device 103; an optical image acquisition device 150 for applying laser light, and acquiring an optical image of a pattern of an inspection sample; a comparison device 140 for inputting the optical image, and comparing the optical image with a comparison object image; and a control device 160 for controlling the laser light source device and the optical image acquisition device. The control device 160 inputs periodically an identifier showing the degree of necessity of maintenance operation of the laser light source device 103 from the laser light source device and an elapsed time from execution of previous maintenance operation, and outputs a maintenance operation execution command to the laser light source device based on at least either of the identifier and the elapsed time. The laser light source device 103 executes maintenance operation of the laser light source device 103 based on the maintenance operation execution command.
MATSUKI KAZUTO
IMAI SHINICHI
NEC CORP
| JP2007279021A | 2007-10-25 | |||
| JP2001296570A | 2001-10-26 | |||
| JP2001160574A | 2001-06-12 | |||
| JPH07140092A | 1995-06-02 | |||
| JPH02230712A | 1990-09-13 |
Akira Sudo
Mitsuyuki Matsuyama
Next Patent: DRIVING DEVICE