Title:
PATTERN MATCHING USING LAMELLA OF KNOWN SHAPE FOR AUTOMATED S/TEM ACQUISITION AND MEASUREMENT
Document Type and Number:
Japanese Patent JP2016156812
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for automatically imaging, in an electron microscope (SEM, TEM or STEM), features in a region of interest in a lamella without the need for prior knowledge of the features to be imaged.SOLUTION: The method enables multiple electron microscope images to be obtained by stepping from a first image location without requiring the use of image recognition of individual image features. By eliminating the need for the image recognition, substantial increases in image acquisition rates may be achieved.SELECTED DRAWING: Figure 11A
Inventors:
PAUL PLACHINDA
JIANG LIANG
JUSTIN ROLLER
JIANG LIANG
JUSTIN ROLLER
Application Number:
JP2016024259A
Publication Date:
September 01, 2016
Filing Date:
February 11, 2016
Export Citation:
Assignee:
FEI CO
International Classes:
G01N23/04; G01N23/20
Domestic Patent References:
| JP2014066705A | 2014-04-17 | |||
| JP2013101123A | 2013-05-23 | |||
| JP2002228606A | 2002-08-14 | |||
| JP2010507781A | 2010-03-11 | |||
| JP2003317654A | 2003-11-07 |
Foreign References:
| US20140084157A1 | 2014-03-27 |
Attorney, Agent or Firm:
Masahiko Amagai