Title:
PATTERN RECOGNIZER
Document Type and Number:
Japanese Patent JP3146568
Kind Code:
B2
Abstract:
PURPOSE: To distinguish a specific pattern accurately and at high speed without erroneously recognizing an arc by processing the waveform of analog signal obtained through relative scan, thereafter by shifting the waveform by a pattern gap quantity and by emphasizing only a partial waveform corresponding to the position in the waveform of a specific pattern.
CONSTITUTION: The waveform of analog signal obtained by the scan of scanning means 1-9 is stored in a storage means 12 in the manner of corresponding to the scanning position on a material body M. Then, the differential waveform of analog signal read from the storage means 12 by a high-speed operation processor 18 is obtained and shifted in the scanning direction by a quantity corresponding to the predetermined space of a plurality of patterns WM and the shifted waveform and the original waveform are composed. The emphasized waveform part of the composite waveform is detected and outputted to a discrimination means 17. On the basis of the determined position, the discrimination means 17 moves a stage ST to an arbitrary position while monitoring the measured coordinate value of an interferometer 14. Thus, only a specific pattern can be surely detected from a wide region on the material body.
Inventors:
Yuji Imai
Application Number:
JP29226091A
Publication Date:
March 19, 2001
Filing Date:
October 09, 1991
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/24; G03F1/42; G03F9/00; G06T1/00; H01L21/027; (IPC1-7): H01L21/027; G01B11/24; G03F1/08; G03F9/00
Domestic Patent References:
| JP61236117A | ||||
| JP62273402A | ||||
| JP63229307A | ||||
| JP63247602A | ||||
| JP2103401A | ||||
| JP4283917A | ||||
| JP3209812A |
Attorney, Agent or Firm:
Masatake Shiga (5 outside)