Title:
パターン転写方法
Document Type and Number:
Japanese Patent JP4845564
Kind Code:
B2
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Inventors:
Toshiro Hiraoka
Kenichi Murooka
Kenichi Murooka
Application Number:
JP2006100041A
Publication Date:
December 28, 2011
Filing Date:
March 31, 2006
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
B29C59/02; B29C33/38; B81C99/00; H01L21/027
Domestic Patent References:
| JP2006326927A | ||||
| JP2003517727A | ||||
| JP2001127145A | ||||
| JP200160617A | ||||
| JP2005277117A |
Attorney, Agent or Firm:
Hiroshi Horiguchi