To compensate, in a three-dimensional shape measuring apparatus which projects a light pattern onto an object by scanning a light beam with a vibrating mirror, for variations attributable to the environmental conditions of the projected light pattern among other factors.
The timings at which a slit light ray scanned by a MEMS mirror 14 passes an end A of the effective scanning range are detected with an optical fiber 20A and an optical detector 36A. A time interval measuring unit 38 measures the time intervals between the timings at which the slit light ray subjected to reciprocating scans passes the end A. A scanning angle determining unit 40 figures out a scanning angle variation pattern matching the measured time intervals, and figures out from the pattern a scanning angle matching the phase of a laser drive signal. A modulation pattern signal generating unit 42 figures out from a projection pattern a laser beam emission intensity matching the scanning angle that has been figured out. A laser drive circuit 32 controls beam emission by a laser 10 in accordance with the laser beam emission intensity that has been figured out.
SHIBATA SUSUMU
NISHIYAMA NAOKI
NISHIO HIROSHI
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| JP2009258089A | 2009-11-05 | |||
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| WO2009063986A1 | 2009-05-22 |