PATTERNING METHOD FOR DIFFRACTION GRATING

Japanese Patent JP3309911

B2

PURPOSE: To form a diffraction grating having the bearing coincident with the bearing of the diffraction grating formed on one surface of a substrate on the other surface.
CONSTITUTION: A reference substrate 12 formed with the diffraction grating is fixed on a rotary stage 11 and a laser beam 41 emitted from a laser beam source 40 for exposing is divided to 41a and 41b. The surface of this reference substrate 12 is irradiated with these beams. The interference fringes of the reflected and diffracted light and the reflected light by the diffraction grating are projected on a screen 50. The bearing of the diffraction grating and the bearing of the interference fringes by two optical fluxes 41a and 41b are aligned. The diffraction grating is irradiated with the bearing detecting light from a laser beam source 30 for bearing detection and the incident angle of the bearing detecting light 31 is adjusted by the position of the reflected and diffracted light captured by a position detector 33. A substrate 14 for processing is fixed in place of the reference substrate 12 on the rotary stage 11 in such a state and is irradiated with the bearing detecting light 31 from a laser beam source 30 for bearing detection. The bearing of the diffraction grating is then so adjusted as to maximize the intensity of the refracted and diffracted light.

Hiroyuki Yamamoto
Yasuo Nakata
Hideo Satoh
Yukio Kurata

JP20190491A

July 29, 2002

August 12, 1991

Click for automatic bibliography generation  

Sharp Corporation

G02B5/18; G02B5/30; G03F7/20; (IPC1-7): G02B5/18; G02B5/30; G03F7/20

JP2143201A
JP28801A
JP4278912A
JP2259702A
JP62211603A
JP61155801U

Shusaku Yamamoto

Previous Patent: SEMICONDUCTOR MANUFACTURING APPARATUS

Next Patent: STYRIL COMPOUND AND MANUFACTURE THEREOF