Title:
PDP SUBSTRATE BAKING FURNACE
Document Type and Number:
Japanese Patent JP2001241849
Kind Code:
A
Abstract:
To obtain a baking furnace of a PDP(plasma display) substrate having good space saving, energy saving, a high clean atmosphere, quick cooling and a waste gas removing efficiency.
The PDP substrate baking furnace comprises heaters 4 and glass substrates 7 arranged at a predetermined interval in a multi-stage in a furnace body 1. In this case, the body 1 having a gas supply port 8 and exhaust ports 9, 9' formed at an interval is tiltably supported.
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Inventors:
IWATANI NOBUO
Application Number:
JP2000057464A
Publication Date:
September 07, 2001
Filing Date:
March 02, 2000
Export Citation:
Assignee:
SHOWA MFG
International Classes:
F27B5/16; F27B5/02; F27D7/02; F27D7/06; H01J9/24; H01J9/46; H01J11/20; H01J11/44; (IPC1-7): F27B5/16; F27B5/02; F27D7/02; F27D7/06; H01J9/46
Attorney, Agent or Firm:
Hideo Dobashi (1 outside)