Title:
PELLICLE CASE, TRAY AND PELLICLE HOLDING METHOD
Document Type and Number:
Japanese Patent JP2021189303
Kind Code:
A
Abstract:
To provide a pellicle case, a tray and a pellicle holding method, capable of suitably holding a pellicle in the pellicle case in storage and in transportation, and capable of suitably taking out the pellicle from the pellicle case when taking out.SOLUTION: Provided is a pellicle case for housing a pellicle having an adhesive layer arranged at one end face of a frame. The pellicle case includes a tray for placing the pellicle. The tray has releasability at lease on a portion with which the adhesive layer has a contact. Peel strength between the portion and the adhesive layer is 0.05 to 2.5 kgf.SELECTED DRAWING: Figure 5
Inventors:
TANAKA TOMOKAZU
MAEDA TAKURO
KUROKAWA KENICHI
HIRANO MASAKATSU
MITSUMORI YUJI
TANI NORIKO
MAEDA TAKURO
KUROKAWA KENICHI
HIRANO MASAKATSU
MITSUMORI YUJI
TANI NORIKO
Application Number:
JP2020094382A
Publication Date:
December 13, 2021
Filing Date:
May 29, 2020
Export Citation:
Assignee:
ASAHI KASEI CORP
International Classes:
G03F1/66; B65D85/86
Domestic Patent References:
| JPH06208221A | 1994-07-26 | |||
| JP2006267179A | 2006-10-05 | |||
| JP2019066848A | 2019-04-25 |
Attorney, Agent or Firm:
Atsushi Aoki
Shinji Mitsuhashi
Kazuhiro Nakamura
Toko Saito
Shunsuke Mima
Shinji Mitsuhashi
Kazuhiro Nakamura
Toko Saito
Shunsuke Mima
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