Title:
ペリクルフレーム装置、マスク、レチクル装置、露光方法及び露光装置並びにデバイスの製造方法
Document Type and Number:
Japanese Patent JP5454136
Kind Code:
B2
Abstract:
A pellicle is provided to one end surface of end surfaces of a frame. Another end surface of the end surfaces of the frame has an area that opposes a substrate. A configuration is adopted that prevents the deformation of the one end surface of the frame and the shape of the opposing area on the other end surface from affecting one another.
Inventors:
Tomoki Miyakawa
Hiromitsu Yoshimoto
Hiromitsu Yoshimoto
Application Number:
JP2009501320A
Publication Date:
March 26, 2014
Filing Date:
February 29, 2008
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F1/64; H01L21/027
Domestic Patent References:
| JP2003228163A | 2003-08-15 | |||
| JP2006146234A | 2006-06-08 | |||
| JPH03132663A | 1991-06-06 | |||
| JP2004191986A | 2004-07-08 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi