Title:
TRANSMISSION TYPE LOW ENERGY ELECTRON MICROSCOPE
Document Type and Number:
Japanese Patent JP2017220458
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transmission type low energy electron microscope.SOLUTION: A transmission type low energy electron microscope includes a vacuum chamber, an electron gun, a diffraction chamber, an imaging device, a sample holder, a core column, a vacuum pump device, and a control computer. The control computer includes a switching module. The switching module is used to switch large beam spot diffraction imaging mode and small beam spot diffraction imaging mode. In large beam spot diffraction imaging mode, an electron beam larger than the size of a two-dimensional nanomaterial sample irradiates the whole surface of the two-dimensional nanomaterial sample. In small beam spot diffraction imaging mode, an electron beam smaller than the size of a two-dimensional nanomaterial sample scans a part of a surface of the two-dimensional nanomaterial sample or the whole surface of the two-dimensional nanomaterial sample.SELECTED DRAWING: Figure 1
Inventors:
LIU PENG
CHO ISAMU
LIN XIAO-YANG
ZHOU DUANLIANG
ZHANG CHUN-HAI
JIANG KAILI
FAN SHOUSHAN
CHO ISAMU
LIN XIAO-YANG
ZHOU DUANLIANG
ZHANG CHUN-HAI
JIANG KAILI
FAN SHOUSHAN
Application Number:
JP2017113278A
Publication Date:
December 14, 2017
Filing Date:
June 08, 2017
Export Citation:
Assignee:
UNIV QINGHUA
HON HAI PREC IND CO LTD
HON HAI PREC IND CO LTD
International Classes:
H01J37/22
Foreign References:
| WO2014185074A1 | 2014-11-20 | |||
| WO2014185074A1 | 2014-11-20 |
Attorney, Agent or Firm:
try international patent corporation
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