Title:
Penetration electron microscope
Document Type and Number:
Japanese Patent JP6239260
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a transmission electron microscope, capable of making both observation in which a sample is placed in a magnetic field of an objective lens whose spherical aberration is corrected and Lorentz observation in which a sample is placed outside of the magnetic field of the objective lens whose spherical aberration is corrected available, and capable of enhancing spatial resolution of Lorentz observation.SOLUTION: In the transmission electron microscope equipped with a spherical aberration corrector, a first sample holder 106b is disposed at an upper stream side of a first objective lens 107, a deflector 105 is disposed at an upper stream side of a second objective lens 109, and a second sample holder 108b is disposed inside of the second objective lens.
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| JPH04332446 | FIELD EMISSION TYPE ELECTRON MICROSCOPE |
Inventors:
Yoshio Takahashi
Sadaharu Katsuta
River Saki Takeshi
Tadao Kozu
Sadaharu Katsuta
River Saki Takeshi
Tadao Kozu
Application Number:
JP2013098298A
Publication Date:
November 29, 2017
Filing Date:
May 08, 2013
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/26; H01J37/141; H01J37/147; H01J37/153; H01J37/20
Domestic Patent References:
| JP2009224067A | ||||
| JP2009193833A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation
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